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1700°C九通道混氣高真空CVD系統(tǒng)
關(guān)鍵字：
CVD、三溫區(qū)、九路質(zhì)子
型號(hào)：
GSL-1700X-HVC9
產(chǎn)品概述：
GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.
免責(zé)聲明： 本站產(chǎn)品介紹內(nèi)容（包括產(chǎn)品圖片、產(chǎn)品描述、技術(shù)參數(shù)等）僅用于宣傳用途，僅供參考。由于更新不及時(shí)和網(wǎng)站不可預(yù)知的BUG可能會(huì)造成數(shù)據(jù)與實(shí)物的偏差，請(qǐng)勿復(fù)制或者截圖。如果您對(duì)參數(shù)有異議，或者想了解產(chǎn)品詳細(xì)信息及更多參數(shù)，請(qǐng)與本公司銷售人員聯(lián)系。本站提供的信息不構(gòu)成任何要約或承諾，請(qǐng)勿將此參數(shù)用于招標(biāo)文件或者合同，科晶公司會(huì)不定期完善和修改網(wǎng)站任何信息，恕不另行通知，請(qǐng)您諒解。 如果您需要下載產(chǎn)品的電子版技術(shù)文檔，說明書（在線閱覽），裝箱單，與售后安裝條件等文件，請(qǐng)點(diǎn)擊上方的附件下載模塊中選取。商城產(chǎn)品僅針對(duì)大陸地區(qū)客戶，購(gòu)買前請(qǐng)與工作人員溝通，以免給您帶來不便。
技術(shù)參數(shù)產(chǎn)品視頻實(shí)驗(yàn)案例警示/應(yīng)用提示配件詳情
Furnace Structure

· Double layer steel casing with air cooling. 

· Two cooling fans inside to keep  case temperature < 55oC.

· 內(nèi)爐膛表面涂有美國(guó)進(jìn)口的高溫氧化鋁涂層可以提高設(shè)備的加熱效率，同時(shí)也可以延長(zhǎng)爐膛的使用壽命

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High purity Alumina refractory chamber

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Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.

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Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.
Power

 6 Kw
Voltage

AC 208-240V Single Phase, 50/60 Hz
Heating Element

8?pcs1800oC grade MoSi2?heating element
Max. Temperature

1650 oC (< 2hours )（更新時(shí)間：19.12.10--JS2）
Continuous Temperature

1600 oC
Max. Heating Rate

≤5  oC /min
Tube Size and Materials

Premier Grade alumina tube made in USA.

（標(biāo)配尺寸） ( 60mm) O.D.x I.D. (54mm) x 1000mm Length

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（選配尺寸） ( 80mm) O.D.x I.D. (74mm) x  1000mm Length 

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Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).
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Heating Zone

Heating zone length: 457 mm (18")

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Constant Temperature Zone length: 150 mm (6")(+/-1oC) 注：由于測(cè)量手段及外部環(huán)境的影響，測(cè)量結(jié)果可能會(huì)有偏差，此參數(shù)僅供參考不作為該設(shè)備的技術(shù)指標(biāo)。您購(gòu)買產(chǎn)品需要準(zhǔn)確的恒溫區(qū)數(shù)據(jù)，請(qǐng)與我公司銷售人員聯(lián)系 
Temperature controllers

One precision digital temperature controller programmable with 50 segments.

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PID adjustable with auto tune function to ensure temperature stability within  +/- 1 oC.    

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控溫儀表操作視頻

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Full protection in each controller for over-temperature and broken thermal couple.
Thermal Couple

B type thermal couples built in
Vacuum Flanges

· Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve.

· Double high temperature silicone O-ring for using under 300oC.

Porous alumina blocks included for protecting flange from heat radiation.
Vacuum pumps

 Tow stages vacuum pump installed in bottom case:

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OneDouble Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr.  

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One turbo molecular pump with max. vacuum pressure of 2x10-5 torr.

One precision vacuum sensor installed. 

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Stainless steel hose tube is included for connecting to tube furnace.

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Digital vacuum meter / controller installed.
Vacuum Sensor & display

Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

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Vacuum controller and display areinstalled in bottom mobile cart.

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Gas flow meter User Manual?(Click to download)

· 9?precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-100% of full scale) 

· 3 MFC at range 0 - 1000scc

· 3 MFC at range 0 - 200scc

· 3 MFC at range 0 - 10 scc

· one floating meter will be installed for N2 gas only

· one mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.

· 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
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Software and interface (optional at extra cost).  Please click uderline for software operation instruction

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Pipe connection,? valves and gas mixer

· SS 316 1/4" pipe/fitting

· SS 316 vacuum needle valves

· 21 sets of stainless steel vacuum valves are installed outside of  right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.

Please click here to see sketch of pipe connection.

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Dimension

Furnace: 550 x 380 x 520  Bottom Mobile case: 600x600x597
Net Weight

about 100 kg
Shipping weight

200 Lbs 
Shipping package size after crating

Two cases in one plastic pallet: 45x45x35/case
Warranty & certificate

One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)

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免責(zé)聲明： 本站產(chǎn)品介紹內(nèi)容（包括產(chǎn)品圖片、產(chǎn)品描述、技術(shù)參數(shù)等）僅用于宣傳用途，僅供參考。由于更新不及時(shí)和網(wǎng)站不可預(yù)知的BUG可能會(huì)造成數(shù)據(jù)與實(shí)物的偏差，請(qǐng)勿復(fù)制或者截圖。如果您對(duì)參數(shù)有異議，或者想了解產(chǎn)品詳細(xì)信息及更多參數(shù)，請(qǐng)與本公司銷售人員聯(lián)系。本站提供的信息不構(gòu)成任何要約或承諾，請(qǐng)勿將此參數(shù)用于招標(biāo)文件或者合同，科晶公司會(huì)不定期完善和修改網(wǎng)站任何信息，恕不另行通知，請(qǐng)您諒解。 如果您需要下載產(chǎn)品的電子版技術(shù)文檔，說明書（在線閱覽），裝箱單，與售后安裝條件等文件，請(qǐng)點(diǎn)擊上方的附件下載模塊中選取。商城產(chǎn)品僅針對(duì)大陸地區(qū)客戶，購(gòu)買前請(qǐng)與工作人員溝通，以免給您帶來不便。
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